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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/iccci/ChenLLTCL10>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jing-Jou_Tang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lian-Yong_Lin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lih-Shyang_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wen-Lin_Cheng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Young-Jinn_Lay>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yu-Jen_Lin>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2F978-3-642-16693-8%5F13>
foaf:homepage <https://doi.org/10.1007/978-3-642-16693-8_13>
dc:identifier DBLP conf/iccci/ChenLLTCL10 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2F978-3-642-16693-8%5F13 (xsd:string)
dcterms:issued 2010 (xsd:gYear)
rdfs:label The 3D Display and Analysis of the Pattern of Photolithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jing-Jou_Tang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lian-Yong_Lin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lih-Shyang_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wen-Lin_Cheng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Young-Jinn_Lay>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yu-Jen_Lin>
swrc:pages 117-127 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/iccci/2010-1>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/iccci/ChenLLTCL10/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/iccci/ChenLLTCL10>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/iccci/iccci2010-1.html#ChenLLTCL10>
rdfs:seeAlso <https://doi.org/10.1007/978-3-642-16693-8_13>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/iccci>
dc:title The 3D Display and Analysis of the Pattern of Photolithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document