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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/iccd/OuXCYP17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Brian_Cline>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/David_Z._Pan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Greg_Yeric>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jiaojiao_Ou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xiaoqing_Xu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICCD.2017.70>
foaf:homepage <https://doi.org/10.1109/ICCD.2017.70>
dc:identifier DBLP conf/iccd/OuXCYP17 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICCD.2017.70 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
rdfs:label DTCO for DSA-MP Hybrid Lithography with Double-BCP Materials in Sub-7nm Node. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Brian_Cline>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/David_Z._Pan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Greg_Yeric>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jiaojiao_Ou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xiaoqing_Xu>
swrc:pages 403-410 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/iccd/2017>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/iccd/OuXCYP17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/iccd/OuXCYP17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/iccd/iccd2017.html#OuXCYP17>
rdfs:seeAlso <https://doi.org/10.1109/ICCD.2017.70>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/iccd>
dc:title DTCO for DSA-MP Hybrid Lithography with Double-BCP Materials in Sub-7nm Node. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document