Composition of Metal Layers in CMOS-MEMS Micromachining Process.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/iceee/Granados-RojasR19
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/iceee/Granados-RojasR19
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Benito_Granados-Rojas
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Griselda_Stephany_Abarca-Jimenez
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Luis_Mart%E2%88%9A%E2%89%A0n_Flores-Nava
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Mario_Alfredo_Reyes-Barranca
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Miguel_%E2%88%9A%C4%80ngel_Aleman-Arce
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Yesenia_Eleonor_Gonz%E2%88%9A%C2%B0lez-Navarro
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FICEEE.2019.8884506
>
foaf:
homepage
<
https://doi.org/10.1109/ICEEE.2019.8884506
>
dc:
identifier
DBLP conf/iceee/Granados-RojasR19
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FICEEE.2019.8884506
(xsd:string)
dcterms:
issued
2019
(xsd:gYear)
rdfs:
label
Composition of Metal Layers in CMOS-MEMS Micromachining Process.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Benito_Granados-Rojas
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Griselda_Stephany_Abarca-Jimenez
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Luis_Mart%E2%88%9A%E2%89%A0n_Flores-Nava
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Mario_Alfredo_Reyes-Barranca
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Miguel_%E2%88%9A%C4%80ngel_Aleman-Arce
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Yesenia_Eleonor_Gonz%E2%88%9A%C2%B0lez-Navarro
>
swrc:
pages
1-4
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/iceee/2019
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/iceee/Granados-RojasR19/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/iceee/Granados-RojasR19
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/iceee/iceee2019.html#Granados-RojasR19
>
rdfs:
seeAlso
<
https://doi.org/10.1109/ICEEE.2019.8884506
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/iceee
>
dc:
title
Composition of Metal Layers in CMOS-MEMS Micromachining Process.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document