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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/iceee/Granados-RojasR19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Benito_Granados-Rojas>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Griselda_Stephany_Abarca-Jimenez>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Luis_Mart%E2%88%9A%E2%89%A0n_Flores-Nava>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mario_Alfredo_Reyes-Barranca>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Miguel_%E2%88%9A%C4%80ngel_Aleman-Arce>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yesenia_Eleonor_Gonz%E2%88%9A%C2%B0lez-Navarro>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICEEE.2019.8884506>
foaf:homepage <https://doi.org/10.1109/ICEEE.2019.8884506>
dc:identifier DBLP conf/iceee/Granados-RojasR19 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICEEE.2019.8884506 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
rdfs:label Composition of Metal Layers in CMOS-MEMS Micromachining Process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Benito_Granados-Rojas>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Griselda_Stephany_Abarca-Jimenez>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Luis_Mart%E2%88%9A%E2%89%A0n_Flores-Nava>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mario_Alfredo_Reyes-Barranca>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Miguel_%E2%88%9A%C4%80ngel_Aleman-Arce>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yesenia_Eleonor_Gonz%E2%88%9A%C2%B0lez-Navarro>
swrc:pages 1-4 (xsd:string)
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rdfs:seeAlso <https://doi.org/10.1109/ICEEE.2019.8884506>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/iceee>
dc:title Composition of Metal Layers in CMOS-MEMS Micromachining Process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document