Photoluminescence properties of thin-film SiOxCy deposited by O-Cat CVD technique using MMS and TEOS.
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Photoluminescence properties of thin-film SiOxCy deposited by O-Cat CVD technique using MMS and TEOS.
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Photoluminescence properties of thin-film SiOxCy deposited by O-Cat CVD technique using MMS and TEOS.
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