Oxygen concentration effect on properties of SiOC thin films obtained by HWCVD.
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/iceee/RamosMM17
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Cris%E2%88%9A%E2%89%A5foro_Morales
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Juan_Ramon_Ramos
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Yasuhiro_Matsumoto
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FICEEE.2017.8108846
>
foaf:
homepage
<
https://doi.org/10.1109/ICEEE.2017.8108846
>
dc:
identifier
DBLP conf/iceee/RamosMM17
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FICEEE.2017.8108846
(xsd:string)
dcterms:
issued
2017
(xsd:gYear)
rdfs:
label
Oxygen concentration effect on properties of SiOC thin films obtained by HWCVD.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Cris%E2%88%9A%E2%89%A5foro_Morales
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Juan_Ramon_Ramos
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Yasuhiro_Matsumoto
>
swrc:
pages
1-4
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/iceee/2017
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/iceee/RamosMM17/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/iceee/RamosMM17
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/iceee/iceee2017.html#RamosMM17
>
rdfs:
seeAlso
<
https://doi.org/10.1109/ICEEE.2017.8108846
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/iceee
>
dc:
title
Oxygen concentration effect on properties of SiOC thin films obtained by HWCVD.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document