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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/iceee/TrinidadVSRLVAAMS23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Antonio_Coyopol_Sol%E2%88%9A%E2%89%A0s>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Enrique_Rosendo_Andr%E2%88%9A%C2%A9s>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fernando_Lopez-Marcos>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Godofredo_Garc%E2%88%9A%E2%89%A0a_Salgado>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Heber_Vilchis>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jos%E2%88%9A%C2%A9_Juan_Gervacio_Arciniega>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Juan_Carlos_P%E2%88%9A%C2%A9rez_Trinidad>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Marco_Antonio_Vasquez-Agustin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Orlando_Cortazar_Mart%E2%88%9A%E2%89%A0nez>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rom%E2%88%9A%C2%B0n_Romano-Trujillo>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FCCE60043.2023.10332817>
foaf:homepage <https://doi.org/10.1109/CCE60043.2023.10332817>
dc:identifier DBLP conf/iceee/TrinidadVSRLVAAMS23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FCCE60043.2023.10332817 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Effect of thermal annealing in H2 atmosphere of SiCxOy films obtained by HFCVD technique. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Antonio_Coyopol_Sol%E2%88%9A%E2%89%A0s>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Enrique_Rosendo_Andr%E2%88%9A%C2%A9s>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fernando_Lopez-Marcos>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Godofredo_Garc%E2%88%9A%E2%89%A0a_Salgado>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Heber_Vilchis>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jos%E2%88%9A%C2%A9_Juan_Gervacio_Arciniega>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Juan_Carlos_P%E2%88%9A%C2%A9rez_Trinidad>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Marco_Antonio_Vasquez-Agustin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Orlando_Cortazar_Mart%E2%88%9A%E2%89%A0nez>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rom%E2%88%9A%C2%B0n_Romano-Trujillo>
swrc:pages 1-7 (xsd:string)
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owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/iceee/TrinidadVSRLVAAMS23/dblp>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/iceee/cce2023.html#TrinidadVSRLVAAMS23>
rdfs:seeAlso <https://doi.org/10.1109/CCE60043.2023.10332817>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/iceee>
dc:title Effect of thermal annealing in H2 atmosphere of SiCxOy films obtained by HFCVD technique. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document