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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icic/LiuLCLL07>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chien-Hung_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chun-Liang_Lin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tsai-Yuan_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Van-Tsai_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yu-Chen_Lin>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2F978-3-540-74171-8%5F61>
foaf:homepage <https://doi.org/10.1007/978-3-540-74171-8_61>
dc:identifier DBLP conf/icic/LiuLCLL07 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2F978-3-540-74171-8%5F61 (xsd:string)
dcterms:issued 2007 (xsd:gYear)
rdfs:label Tracking Control of the Z-Tilts Error Compensation Stage of the Nano-measuring Machine Using Capacitor Insertion Method. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chien-Hung_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chun-Liang_Lin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tsai-Yuan_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Van-Tsai_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yu-Chen_Lin>
swrc:pages 616-625 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icic/2007-1>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icic/LiuLCLL07/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icic/LiuLCLL07>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icic/icic2007-1.html#LiuLCLL07>
rdfs:seeAlso <https://doi.org/10.1007/978-3-540-74171-8_61>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icic>
dc:subject Capacitor Insertion; Nano-measuring Machine; Laser-measuring Systems; Z-tilts; Piezoelectric Actuator (xsd:string)
dc:title Tracking Control of the Z-Tilts Error Compensation Stage of the Nano-measuring Machine Using Capacitor Insertion Method. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document