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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icicdt/EriguchiTO14>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Koji_Eriguchi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kouichi_Ono>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yoshinori_Takao>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICICDT.2014.6838597>
foaf:homepage <https://doi.org/10.1109/ICICDT.2014.6838597>
dc:identifier DBLP conf/icicdt/EriguchiTO14 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICICDT.2014.6838597 (xsd:string)
dcterms:issued 2014 (xsd:gYear)
rdfs:label A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Koji_Eriguchi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kouichi_Ono>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yoshinori_Takao>
swrc:pages 1-5 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icicdt/2014>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icicdt/EriguchiTO14/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icicdt/EriguchiTO14>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icicdt/icicdt2014.html#EriguchiTO14>
rdfs:seeAlso <https://doi.org/10.1109/ICICDT.2014.6838597>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icicdt>
dc:title A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document