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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icicdt/TriyosoHOSSL13>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dina_H._Triyoso>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jamie_K._Schaeffer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jeff_Shu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Klaus_Hempel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Markus_Lenski>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Susanne_Ohsiek>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICICDT.2013.6563305>
foaf:homepage <https://doi.org/10.1109/ICICDT.2013.6563305>
dc:identifier DBLP conf/icicdt/TriyosoHOSSL13 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICICDT.2013.6563305 (xsd:string)
dcterms:issued 2013 (xsd:gYear)
rdfs:label Impact of precursors choice on characteristics of PEALD SiN for spacer applications. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dina_H._Triyoso>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jamie_K._Schaeffer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jeff_Shu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Klaus_Hempel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Markus_Lenski>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Susanne_Ohsiek>
swrc:pages 69-72 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icicdt/2013>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icicdt/TriyosoHOSSL13/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icicdt/TriyosoHOSSL13>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icicdt/icicdt2013.html#TriyosoHOSSL13>
rdfs:seeAlso <https://doi.org/10.1109/ICICDT.2013.6563305>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icicdt>
dc:title Impact of precursors choice on characteristics of PEALD SiN for spacer applications. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document