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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icicdt/TriyosoJSMHSL12>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/D._H._Triyoso>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jamie_K._Schaeffer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jeff_Shu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Klaus_Hempel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Markus_Lenski>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._Mutas>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/V._Jaschke>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICICDT.2012.6232870>
foaf:homepage <https://doi.org/10.1109/ICICDT.2012.6232870>
dc:identifier DBLP conf/icicdt/TriyosoJSMHSL12 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICICDT.2012.6232870 (xsd:string)
dcterms:issued 2012 (xsd:gYear)
rdfs:label Robust PEALD SiN spacer for gate first high-k metal gate integration. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/D._H._Triyoso>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jamie_K._Schaeffer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jeff_Shu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Klaus_Hempel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Markus_Lenski>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._Mutas>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/V._Jaschke>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icicdt/2012>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icicdt/TriyosoJSMHSL12/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icicdt/TriyosoJSMHSL12>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icicdt/icicdt2012.html#TriyosoJSMHSL12>
rdfs:seeAlso <https://doi.org/10.1109/ICICDT.2012.6232870>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icicdt>
dc:title Robust PEALD SiN spacer for gate first high-k metal gate integration. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document