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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icira/WuLW08>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jun_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pinkuan_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yulin_Wang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2F978-3-540-88513-9%5F31>
foaf:homepage <https://doi.org/10.1007/978-3-540-88513-9_31>
dc:identifier DBLP conf/icira/WuLW08 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2F978-3-540-88513-9%5F31 (xsd:string)
dcterms:issued 2008 (xsd:gYear)
rdfs:label Design and Analysis of Vacuum Robot for Cluster Tools. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jun_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pinkuan_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yulin_Wang>
swrc:pages 286-293 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icira/2008-1>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icira/WuLW08/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icira/WuLW08>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icira/icira2008-1.html#WuLW08>
rdfs:seeAlso <https://doi.org/10.1007/978-3-540-88513-9_31>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icira>
dc:subject vacuum robot; magnetic couplings; trajectory planning (xsd:string)
dc:title Design and Analysis of Vacuum Robot for Cluster Tools. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document