Realization of the Synchronization Mechanism of Step and Scan Projection Lithography.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/icira/YangZPT08
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/icira/YangZPT08
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Haihong_Pan
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Liangliang_Yang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Wei_Teng
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Yunfei_Zhou
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1007%2F978-3-540-88518-4%5F17
>
foaf:
homepage
<
https://doi.org/10.1007/978-3-540-88518-4_17
>
dc:
identifier
DBLP conf/icira/YangZPT08
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1007%2F978-3-540-88518-4%5F17
(xsd:string)
dcterms:
issued
2008
(xsd:gYear)
rdfs:
label
Realization of the Synchronization Mechanism of Step and Scan Projection Lithography.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Haihong_Pan
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Liangliang_Yang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Wei_Teng
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Yunfei_Zhou
>
swrc:
pages
151-161
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/icira/2008-2
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/icira/YangZPT08/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/icira/YangZPT08
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/icira/icira2008-2.html#YangZPT08
>
rdfs:
seeAlso
<
https://doi.org/10.1007/978-3-540-88518-4_17
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/icira
>
dc:
subject
Step and scan projection lithography; synchronization control; state synchronization; high speed high precision motion control
(xsd:string)
dc:
title
Realization of the Synchronization Mechanism of Step and Scan Projection Lithography.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document