Macro-micro Driven Ultra-Precision Positioning Stage for Conventional Grinder.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/icira/ZhangLXY08
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2008
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Macro-micro Driven Ultra-Precision Positioning Stage for Conventional Grinder.
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Macro-micro driven; precision grinder; micro feed; piezoelectric actuator; flexible hinge
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Macro-micro Driven Ultra-Precision Positioning Stage for Conventional Grinder.
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