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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ickii/LiXLCWLW20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chao-Nan_Wei>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jia-Wei_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jian-Ming_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mu-Chun_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Si-Ping_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wei-Hao_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wen-How_Lan>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICKII50300.2020.9318785>
foaf:homepage <https://doi.org/10.1109/ICKII50300.2020.9318785>
dc:identifier DBLP conf/ickii/LiXLCWLW20 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICKII50300.2020.9318785 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
rdfs:label Patterns of Exposing Integrity of 28nm-node High-k Gate Dielectric on p-substrate with Nitridation Treatments. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chao-Nan_Wei>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jia-Wei_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jian-Ming_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mu-Chun_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Si-Ping_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wei-Hao_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wen-How_Lan>
swrc:pages 67-70 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ickii/2020>
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owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ickii/LiXLCWLW20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ickii/ickii2020.html#LiXLCWLW20>
rdfs:seeAlso <https://doi.org/10.1109/ICKII50300.2020.9318785>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ickii>
dc:title Patterns of Exposing Integrity of 28nm-node High-k Gate Dielectric on p-substrate with Nitridation Treatments. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document