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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icmech/HuamanKHSWDMR21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alex_S._Huaman>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Christoph_Sch%E2%88%9A%C2%A7ffel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Christoph_Weise>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Denis_Dontsov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Eberhard_Manske>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Johann_Reger>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michael_Katzschmann>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Steffen_Hesse>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICM46511.2021.9385699>
foaf:homepage <https://doi.org/10.1109/ICM46511.2021.9385699>
dc:identifier DBLP conf/icmech/HuamanKHSWDMR21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICM46511.2021.9385699 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alex_S._Huaman>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Christoph_Sch%E2%88%9A%C2%A7ffel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Christoph_Weise>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Denis_Dontsov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Eberhard_Manske>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Johann_Reger>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michael_Katzschmann>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Steffen_Hesse>
swrc:pages 1-6 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icmech/2021>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icmech/icm2021.html#HuamanKHSWDMR21>
rdfs:seeAlso <https://doi.org/10.1109/ICM46511.2021.9385699>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icmech>
dc:title Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document