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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icmens/JakewayCVCLG03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/H._John_Crabtree>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Helge_Luesebrink>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Neil_S._Cameron>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Stephen_C._Jakeway>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Teodor_Veres>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Thomas_Glinsner>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICMENS.2003.1221977>
foaf:homepage <https://doi.org/10.1109/ICMENS.2003.1221977>
dc:identifier DBLP conf/icmens/JakewayCVCLG03 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICMENS.2003.1221977 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
rdfs:label Transition of MEMS Technology to Nanofabrication. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/H._John_Crabtree>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Helge_Luesebrink>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Neil_S._Cameron>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Stephen_C._Jakeway>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Teodor_Veres>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Thomas_Glinsner>
swrc:pages 118-122 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icmens/2003>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icmens/JakewayCVCLG03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icmens/JakewayCVCLG03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icmens/icmens2003.html#JakewayCVCLG03>
rdfs:seeAlso <https://doi.org/10.1109/ICMENS.2003.1221977>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icmens>
dc:title Transition of MEMS Technology to Nanofabrication. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document