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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icmens/JianLSBDG03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bernd_Loechel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Heinz-Ulrich_Scheunemann>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jost_Goettert>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Linke_Jian>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Martin_Bednarzik>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yohannes_M._Desta>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICMENS.2003.1221957>
foaf:homepage <https://doi.org/10.1109/ICMENS.2003.1221957>
dc:identifier DBLP conf/icmens/JianLSBDG03 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICMENS.2003.1221957 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
rdfs:label Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcomponents by Deep and Ultra Deep X-Ray Lithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bernd_Loechel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Heinz-Ulrich_Scheunemann>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jost_Goettert>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Linke_Jian>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Martin_Bednarzik>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yohannes_M._Desta>
swrc:pages 10-14 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icmens/2003>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icmens/JianLSBDG03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icmens/JianLSBDG03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icmens/icmens2003.html#JianLSBDG03>
rdfs:seeAlso <https://doi.org/10.1109/ICMENS.2003.1221957>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icmens>
dc:title Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcomponents by Deep and Ultra Deep X-Ray Lithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document