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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icmens/NovakWUS03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Der-Shen_Wan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Erik_Novak>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Joanna_Schmit>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Paul_Unruh>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICMENS.2003.1222010>
foaf:homepage <https://doi.org/10.1109/ICMENS.2003.1222010>
dc:identifier DBLP conf/icmens/NovakWUS03 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICMENS.2003.1222010 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
rdfs:label Dynamic MEMS Measurement Using a Strobed Interferometric System with Combined Coherence Sensing and Phase Information. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Der-Shen_Wan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Erik_Novak>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Joanna_Schmit>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Paul_Unruh>
swrc:pages 285- (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icmens/2003>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icmens/NovakWUS03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icmens/NovakWUS03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icmens/icmens2003.html#NovakWUS03>
rdfs:seeAlso <https://doi.org/10.1109/ICMENS.2003.1222010>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icmens>
dc:title Dynamic MEMS Measurement Using a Strobed Interferometric System with Combined Coherence Sensing and Phase Information. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document