Optical MEMS pressure sensor using ring resonator on a circular diaphragm.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/icmens/PattnaikVSS05
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Optical MEMS pressure sensor using ring resonator on a circular diaphragm.
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Optical MEMS pressure sensor using ring resonator on a circular diaphragm.
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