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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icmens/SamsonAKWOB05>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/John_Bumgarner>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rahul_Agarwal>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Scott_Samson>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shinzo_Onishi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sunny_Kedia>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weidong_Wang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICMENS.2005.50>
foaf:homepage <https://doi.org/10.1109/ICMENS.2005.50>
dc:identifier DBLP conf/icmens/SamsonAKWOB05 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICMENS.2005.50 (xsd:string)
dcterms:issued 2005 (xsd:gYear)
rdfs:label Fabrication Processes for Packaged Optical MEMS Devices. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/John_Bumgarner>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rahul_Agarwal>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Scott_Samson>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shinzo_Onishi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sunny_Kedia>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weidong_Wang>
swrc:pages 113-120 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icmens/2005>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icmens/SamsonAKWOB05/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icmens/SamsonAKWOB05>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icmens/icmens2005.html#SamsonAKWOB05>
rdfs:seeAlso <https://doi.org/10.1109/ICMENS.2005.50>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icmens>
dc:title Fabrication Processes for Packaged Optical MEMS Devices. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document