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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icphys/GolraAE20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fahad_Rafique_Golra>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Marc_Engel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Selma_Azaiez>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICPS48405.2020.9274791>
foaf:homepage <https://doi.org/10.1109/ICPS48405.2020.9274791>
dc:identifier DBLP conf/icphys/GolraAE20 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICPS48405.2020.9274791 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
rdfs:label Multi-level modeling to OPC UA for migrating to Industry 4.0 in semiconductor manufacturing. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fahad_Rafique_Golra>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Marc_Engel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Selma_Azaiez>
swrc:pages 589-595 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icphys/2020>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icphys/GolraAE20/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icphys/GolraAE20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icphys/icps2020.html#GolraAE20>
rdfs:seeAlso <https://doi.org/10.1109/ICPS48405.2020.9274791>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icphys>
dc:title Multi-level modeling to OPC UA for migrating to Industry 4.0 in semiconductor manufacturing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document