Multi-level modeling to OPC UA for migrating to Industry 4.0 in semiconductor manufacturing.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/icphys/GolraAE20
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Multi-level modeling to OPC UA for migrating to Industry 4.0 in semiconductor manufacturing.
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Multi-level modeling to OPC UA for migrating to Industry 4.0 in semiconductor manufacturing.
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