Capacity planning of a photolithography work cell in a wafer manufacturing line.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/icra/SpenceW87
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/icra/SpenceW87
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Anne_M._Spence
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Douglas_J._Welter
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FROBOT.1987.1087949
>
foaf:
homepage
<
https://doi.org/10.1109/ROBOT.1987.1087949
>
dc:
identifier
DBLP conf/icra/SpenceW87
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FROBOT.1987.1087949
(xsd:string)
dcterms:
issued
1987
(xsd:gYear)
rdfs:
label
Capacity planning of a photolithography work cell in a wafer manufacturing line.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Anne_M._Spence
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Douglas_J._Welter
>
swrc:
pages
702-708
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/icra/1987
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/icra/SpenceW87/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/icra/SpenceW87
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/icra/icra1987.html#SpenceW87
>
rdfs:
seeAlso
<
https://doi.org/10.1109/ROBOT.1987.1087949
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/icra
>
dc:
title
Capacity planning of a photolithography work cell in a wafer manufacturing line.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document