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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icra/SuTCW08>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fan-Tien_Cheng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wei-Ming_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wen-Huang_Tsai>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yu-Chuan_Su>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FROBOT.2008.4543767>
foaf:homepage <https://doi.org/10.1109/ROBOT.2008.4543767>
dc:identifier DBLP conf/icra/SuTCW08 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FROBOT.2008.4543767 (xsd:string)
dcterms:issued 2008 (xsd:gYear)
rdfs:label Development of a dual-stage virtual metrology architecture for TFT-LCD manufacturing. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fan-Tien_Cheng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wei-Ming_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wen-Huang_Tsai>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yu-Chuan_Su>
swrc:pages 3630-3635 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icra/2008>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icra/SuTCW08/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icra/SuTCW08>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icra/icra2008.html#SuTCW08>
rdfs:seeAlso <https://doi.org/10.1109/ROBOT.2008.4543767>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icra>
dc:title Development of a dual-stage virtual metrology architecture for TFT-LCD manufacturing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document