[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icra/TeoCYL07>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Guilin_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/I-Ming_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tat_Joo_Teo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wei_Lin_0002>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FROBOT.2007.363183>
foaf:homepage <https://doi.org/10.1109/ROBOT.2007.363183>
dc:identifier DBLP conf/icra/TeoCYL07 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FROBOT.2007.363183 (xsd:string)
dcterms:issued 2007 (xsd:gYear)
rdfs:label A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Guilin_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/I-Ming_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tat_Joo_Teo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wei_Lin_0002>
swrc:pages 1419-1424 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icra/2007>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icra/TeoCYL07/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icra/TeoCYL07>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icra/icra2007.html#TeoCYL07>
rdfs:seeAlso <https://doi.org/10.1109/ROBOT.2007.363183>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icra>
dc:title A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document