[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icsai/GuoG19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qunchao_Guo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xinhua_Geng>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICSAI48974.2019.9010228>
foaf:homepage <https://doi.org/10.1109/ICSAI48974.2019.9010228>
dc:identifier DBLP conf/icsai/GuoG19 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICSAI48974.2019.9010228 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
rdfs:label Deposition High Quality P-type Microcrystalline Silicon Thin Films by RF-PECVD. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qunchao_Guo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xinhua_Geng>
swrc:pages 263-267 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icsai/2019>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icsai/GuoG19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icsai/GuoG19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icsai/icsai2019.html#GuoG19>
rdfs:seeAlso <https://doi.org/10.1109/ICSAI48974.2019.9010228>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icsai>
dc:title Deposition High Quality P-type Microcrystalline Silicon Thin Films by RF-PECVD. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document