Deposition High Quality P-type Microcrystalline Silicon Thin Films by RF-PECVD.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/icsai/GuoG19
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/icsai/GuoG19
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Qunchao_Guo
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Xinhua_Geng
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FICSAI48974.2019.9010228
>
foaf:
homepage
<
https://doi.org/10.1109/ICSAI48974.2019.9010228
>
dc:
identifier
DBLP conf/icsai/GuoG19
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FICSAI48974.2019.9010228
(xsd:string)
dcterms:
issued
2019
(xsd:gYear)
rdfs:
label
Deposition High Quality P-type Microcrystalline Silicon Thin Films by RF-PECVD.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Qunchao_Guo
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Xinhua_Geng
>
swrc:
pages
263-267
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/icsai/2019
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/icsai/GuoG19/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/icsai/GuoG19
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/icsai/icsai2019.html#GuoG19
>
rdfs:
seeAlso
<
https://doi.org/10.1109/ICSAI48974.2019.9010228
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/icsai
>
dc:
title
Deposition High Quality P-type Microcrystalline Silicon Thin Films by RF-PECVD.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document