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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icsc2/JebriGAOP16>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/El_Mostafa_El_Adel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Guillaume_Graton>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jacques_Pinaton>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mohamed_Ali_Jebri>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mustapha_Ouladsine>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICoSC.2016.7507082>
foaf:homepage <https://doi.org/10.1109/ICoSC.2016.7507082>
dc:identifier DBLP conf/icsc2/JebriGAOP16 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICoSC.2016.7507082 (xsd:string)
dcterms:issued 2016 (xsd:gYear)
rdfs:label Virtual metrology on Chemical Mechanical Planarization process based on Just-In-Time Learning. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/El_Mostafa_El_Adel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Guillaume_Graton>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jacques_Pinaton>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mohamed_Ali_Jebri>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mustapha_Ouladsine>
swrc:pages 169-174 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icsc2/2016>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icsc2/JebriGAOP16/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icsc2/JebriGAOP16>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icsc2/icsc2016.html#JebriGAOP16>
rdfs:seeAlso <https://doi.org/10.1109/ICoSC.2016.7507082>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icsc2>
dc:title Virtual metrology on Chemical Mechanical Planarization process based on Just-In-Time Learning. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document