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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icsenst/KrohsF13>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Florian_Krohs>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sergej_Fatikow>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICSensT.2013.6727725>
foaf:homepage <https://doi.org/10.1109/ICSensT.2013.6727725>
dc:identifier DBLP conf/icsenst/KrohsF13 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICSensT.2013.6727725 (xsd:string)
dcterms:issued 2013 (xsd:gYear)
rdfs:label Novel high-resolution sidewall imaging using standard Atomic Force Microscopy equipment: Exceeding surface scanning using customized FIB-milled AFM tips in torsional feedback mode. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Florian_Krohs>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sergej_Fatikow>
swrc:pages 608-611 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icsenst/2013>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icsenst/KrohsF13/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icsenst/KrohsF13>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icsenst/icst2013.html#KrohsF13>
rdfs:seeAlso <https://doi.org/10.1109/ICSensT.2013.6727725>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icsenst>
dc:title Novel high-resolution sidewall imaging using standard Atomic Force Microscopy equipment: Exceeding surface scanning using customized FIB-milled AFM tips in torsional feedback mode. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document