Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/icsenst/NojdelovVNN15
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Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement.
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Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement.
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