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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/icumt/AranovskiyKBPZDO14>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Aleksandr_A._Kapitonov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alexey_A._Bobtsov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Anton_A._Pyrkin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Denis_Davydov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Evgeny_Zavarin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Romeo_Ortega>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Stanislav_Aranovskiy>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICUMT.2014.7002165>
foaf:homepage <https://doi.org/10.1109/ICUMT.2014.7002165>
dc:identifier DBLP conf/icumt/AranovskiyKBPZDO14 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICUMT.2014.7002165 (xsd:string)
dcterms:issued 2014 (xsd:gYear)
rdfs:label Robust control of rapid thermal processes applied to vapor deposition processing. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Aleksandr_A._Kapitonov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alexey_A._Bobtsov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Anton_A._Pyrkin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Denis_Davydov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Evgeny_Zavarin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Romeo_Ortega>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Stanislav_Aranovskiy>
swrc:pages 578-583 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/icumt/2014>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/icumt/AranovskiyKBPZDO14/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/icumt/AranovskiyKBPZDO14>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/icumt/icumt2014.html#AranovskiyKBPZDO14>
rdfs:seeAlso <https://doi.org/10.1109/ICUMT.2014.7002165>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/icumt>
dc:title Robust control of rapid thermal processes applied to vapor deposition processing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document