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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/iecon/KhanCMHS12>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Imran_Khan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/James_Chong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michael_J._Schertzer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ridha_Ben_Mrad>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Siyuan_He>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIECON.2012.6389253>
foaf:homepage <https://doi.org/10.1109/IECON.2012.6389253>
dc:identifier DBLP conf/iecon/KhanCMHS12 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIECON.2012.6389253 (xsd:string)
dcterms:issued 2012 (xsd:gYear)
rdfs:label Performance of an electrostatic actuated micromirror in a vacuum and non-vacuum packaging. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Imran_Khan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/James_Chong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michael_J._Schertzer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ridha_Ben_Mrad>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Siyuan_He>
swrc:pages 3987-3990 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/iecon/2012>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/iecon/KhanCMHS12/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/iecon/KhanCMHS12>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/iecon/iecon2012.html#KhanCMHS12>
rdfs:seeAlso <https://doi.org/10.1109/IECON.2012.6389253>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/iecon>
dc:title Performance of an electrostatic actuated micromirror in a vacuum and non-vacuum packaging. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document