An acoustic set up for the vibration analysis of silicon wafers. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

Property	Value
dcterms:bibliographicCitation	<http://dblp.uni-trier.de/rec/bibtex/conf/iecon/MitterhoferPS13>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Jakob_D._P%E2%88%9A%C4%BEhringer>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Stefan_Mitterhofer>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Viktor_Schlosser>
foaf:homepage	<http://dx.doi.org/doi.org%2F10.1109%2FIECON.2013.6700482>
foaf:homepage	<https://doi.org/10.1109/IECON.2013.6700482>
dc:identifier	DBLP conf/iecon/MitterhoferPS13 (xsd:string)
dc:identifier	DOI doi.org%2F10.1109%2FIECON.2013.6700482 (xsd:string)
dcterms:issued	2013 (xsd:gYear)
rdfs:label	An acoustic set up for the vibration analysis of silicon wafers. (xsd:string)
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Jakob_D._P%E2%88%9A%C4%BEhringer>
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Stefan_Mitterhofer>
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Viktor_Schlosser>
swrc:pages	8068-8073 (xsd:string)
dcterms:partOf	<https://dblp.l3s.de/d2r/resource/publications/conf/iecon/2013>
owl:sameAs	<http://bibsonomy.org/uri/bibtexkey/conf/iecon/MitterhoferPS13/dblp>
owl:sameAs	<http://dblp.rkbexplorer.com/id/conf/iecon/MitterhoferPS13>
rdfs:seeAlso	<http://dblp.uni-trier.de/db/conf/iecon/iecon2013.html#MitterhoferPS13>
rdfs:seeAlso	<https://doi.org/10.1109/IECON.2013.6700482>
swrc:series	<https://dblp.l3s.de/d2r/resource/conferences/iecon>
dc:title	An acoustic set up for the vibration analysis of silicon wafers. (xsd:string)
dc:type	<http://purl.org/dc/dcmitype/Text>
rdf:type	swrc:InProceedings
rdf:type	foaf:Document