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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ieeesensors/AydinKGZK16>
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dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mustafa_Kang%E2%88%9A%C4%BEl>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICSENS.2016.7808938>
foaf:homepage <https://doi.org/10.1109/ICSENS.2016.7808938>
dc:identifier DBLP conf/ieeesensors/AydinKGZK16 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICSENS.2016.7808938 (xsd:string)
dcterms:issued 2016 (xsd:gYear)
rdfs:label A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination. (xsd:string)
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foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mustafa_Kang%E2%88%9A%C4%BEl>
swrc:pages 1-3 (xsd:string)
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rdfs:seeAlso <https://doi.org/10.1109/ICSENS.2016.7808938>
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dc:title A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document