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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ieeesensors/BaehrF0R020>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Marvin_Freier>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Matthew_Lewis_0003>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Oliver_Bringmann_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ulrich_Baehr>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wolfgang_Rosenstiel>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSENSORS47125.2020.9278875>
foaf:homepage <https://doi.org/10.1109/SENSORS47125.2020.9278875>
dc:identifier DBLP conf/ieeesensors/BaehrF0R020 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSENSORS47125.2020.9278875 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
rdfs:label A New Method for Detecting Leaks in MEMS Accelerometers at Wafer-Level. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Marvin_Freier>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Matthew_Lewis_0003>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Oliver_Bringmann_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ulrich_Baehr>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wolfgang_Rosenstiel>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ieeesensors/2020>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ieeesensors/BaehrF0R020/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ieeesensors/BaehrF0R020>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2020.html#BaehrF0R020>
rdfs:seeAlso <https://doi.org/10.1109/SENSORS47125.2020.9278875>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ieeesensors>
dc:title A New Method for Detecting Leaks in MEMS Accelerometers at Wafer-Level. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document