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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ieeesensors/KuruiTFSKISS17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Akihiro_Kojima>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Akira_Fujimoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hideki_Shibata>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hideyuki_Tomizawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tamio_Ikehashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tomohiro_Saito>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yoshiaki_Sugizaki>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yoshihiko_Kurui>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICSENS.2017.8233927>
foaf:homepage <https://doi.org/10.1109/ICSENS.2017.8233927>
dc:identifier DBLP conf/ieeesensors/KuruiTFSKISS17 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICSENS.2017.8233927 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
rdfs:label The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Akihiro_Kojima>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Akira_Fujimoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hideki_Shibata>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hideyuki_Tomizawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tamio_Ikehashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tomohiro_Saito>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yoshiaki_Sugizaki>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yoshihiko_Kurui>
swrc:pages 1-3 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ieeesensors/2017>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ieeesensors/KuruiTFSKISS17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ieeesensors/KuruiTFSKISS17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2017.html#KuruiTFSKISS17>
rdfs:seeAlso <https://doi.org/10.1109/ICSENS.2017.8233927>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ieeesensors>
dc:title The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document