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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ieeesensors/LeclerMF19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Luc_G._Fr%E2%88%9A%C2%A9chette>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Olivier_Marconot>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Simon_Lecler>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSENSORS43011.2019.8956864>
foaf:homepage <https://doi.org/10.1109/SENSORS43011.2019.8956864>
dc:identifier DBLP conf/ieeesensors/LeclerMF19 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSENSORS43011.2019.8956864 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
rdfs:label SiO2/SiN membranes as MEMS Pirani gauges for wide pressure measurement range. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Luc_G._Fr%E2%88%9A%C2%A9chette>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Olivier_Marconot>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Simon_Lecler>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ieeesensors/2019>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ieeesensors/LeclerMF19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ieeesensors/LeclerMF19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2019.html#LeclerMF19>
rdfs:seeAlso <https://doi.org/10.1109/SENSORS43011.2019.8956864>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ieeesensors>
dc:title SiO2/SiN membranes as MEMS Pirani gauges for wide pressure measurement range. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document