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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ieeesensors/NakamuraHTTLP16>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Florian_Larramendy>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Katsuo_Nakamura>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Oliver_Paul>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Osamu_Tabata>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toshiyuki_Tsuchiya>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yoshikazu_Hirai>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICSENS.2016.7808444>
foaf:homepage <https://doi.org/10.1109/ICSENS.2016.7808444>
dc:identifier DBLP conf/ieeesensors/NakamuraHTTLP16 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICSENS.2016.7808444 (xsd:string)
dcterms:issued 2016 (xsd:gYear)
rdfs:label Simulation study of SU-8 structures realized by single-step projection photolithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Florian_Larramendy>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Katsuo_Nakamura>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Oliver_Paul>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Osamu_Tabata>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toshiyuki_Tsuchiya>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yoshikazu_Hirai>
swrc:pages 1-3 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ieeesensors/2016>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2016.html#NakamuraHTTLP16>
rdfs:seeAlso <https://doi.org/10.1109/ICSENS.2016.7808444>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ieeesensors>
dc:title Simulation study of SU-8 structures realized by single-step projection photolithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document