Simulation study of SU-8 structures realized by single-step projection photolithography.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/ieeesensors/NakamuraHTTLP16
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/ieeesensors/NakamuraHTTLP16
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Florian_Larramendy
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Katsuo_Nakamura
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Oliver_Paul
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Osamu_Tabata
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Toshiyuki_Tsuchiya
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Yoshikazu_Hirai
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FICSENS.2016.7808444
>
foaf:
homepage
<
https://doi.org/10.1109/ICSENS.2016.7808444
>
dc:
identifier
DBLP conf/ieeesensors/NakamuraHTTLP16
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FICSENS.2016.7808444
(xsd:string)
dcterms:
issued
2016
(xsd:gYear)
rdfs:
label
Simulation study of SU-8 structures realized by single-step projection photolithography.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Florian_Larramendy
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Katsuo_Nakamura
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Oliver_Paul
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Osamu_Tabata
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Toshiyuki_Tsuchiya
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Yoshikazu_Hirai
>
swrc:
pages
1-3
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/ieeesensors/2016
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/ieeesensors/NakamuraHTTLP16/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/ieeesensors/NakamuraHTTLP16
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2016.html#NakamuraHTTLP16
>
rdfs:
seeAlso
<
https://doi.org/10.1109/ICSENS.2016.7808444
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/ieeesensors
>
dc:
title
Simulation study of SU-8 structures realized by single-step projection photolithography.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document