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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ieeesensors/Rad23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ashkan_Rad>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSENSORS56945.2023.10324950>
foaf:homepage <https://doi.org/10.1109/SENSORS56945.2023.10324950>
dc:identifier DBLP conf/ieeesensors/Rad23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSENSORS56945.2023.10324950 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Low-Bow Glass-Si Anodic Wafer Bonding at High Temperature by Means of CTE Engineering of Corning Novel Fusion Glass. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ashkan_Rad>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ieeesensors/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ieeesensors/Rad23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ieeesensors/Rad23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2023.html#Rad23>
rdfs:seeAlso <https://doi.org/10.1109/SENSORS56945.2023.10324950>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ieeesensors>
dc:title Low-Bow Glass-Si Anodic Wafer Bonding at High Temperature by Means of CTE Engineering of Corning Novel Fusion Glass. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document