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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ieeesensors/SuiKWWLXF22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Haoran_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Huikai_Xie>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jaesung_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Philip_X.-L._Feng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tahmid_Kaisar>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wen_Sui>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yihao_Wu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSENSORS52175.2022.9967330>
foaf:homepage <https://doi.org/10.1109/SENSORS52175.2022.9967330>
dc:identifier DBLP conf/ieeesensors/SuiKWWLXF22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSENSORS52175.2022.9967330 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
rdfs:label Thin Film PZT Multimode Resonant MEMS Temperature Sensor. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Haoran_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Huikai_Xie>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jaesung_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Philip_X.-L._Feng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tahmid_Kaisar>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wen_Sui>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yihao_Wu>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ieeesensors/2022>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ieeesensors/SuiKWWLXF22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ieeesensors/SuiKWWLXF22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2022.html#SuiKWWLXF22>
rdfs:seeAlso <https://doi.org/10.1109/SENSORS52175.2022.9967330>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ieeesensors>
dc:title Thin Film PZT Multimode Resonant MEMS Temperature Sensor. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document