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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ieeesensors/YamashitaYY23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Junpei_Yamamoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kaoru_Yamashita>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhengxin_Yi>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSENSORS56945.2023.10325223>
foaf:homepage <https://doi.org/10.1109/SENSORS56945.2023.10325223>
dc:identifier DBLP conf/ieeesensors/YamashitaYY23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSENSORS56945.2023.10325223 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Resonance Frequency and Vibration Mode Modification of Piezoelectric MEMS Ultrasonic Sensors on Buckled Diaphragm Structures for High Sensitivity and High Resolution Measurement. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Junpei_Yamamoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kaoru_Yamashita>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhengxin_Yi>
swrc:pages 1-3 (xsd:string)
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2023.html#YamashitaYY23>
rdfs:seeAlso <https://doi.org/10.1109/SENSORS56945.2023.10325223>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ieeesensors>
dc:title Resonance Frequency and Vibration Mode Modification of Piezoelectric MEMS Ultrasonic Sensors on Buckled Diaphragm Structures for High Sensitivity and High Resolution Measurement. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document