A Feature Ensemble Model for Material Rate Prediction in Chemical Mechanical Planarization. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

Property	Value
dcterms:bibliographicCitation	<http://dblp.uni-trier.de/rec/bibtex/conf/ieem/Wang21>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Rui_Wang_0092>
foaf:homepage	<http://dx.doi.org/doi.org%2F10.1109%2FIEEM50564.2021.9672985>
foaf:homepage	<https://doi.org/10.1109/IEEM50564.2021.9672985>
dc:identifier	DBLP conf/ieem/Wang21 (xsd:string)
dc:identifier	DOI doi.org%2F10.1109%2FIEEM50564.2021.9672985 (xsd:string)
dcterms:issued	2021 (xsd:gYear)
rdfs:label	A Feature Ensemble Model for Material Rate Prediction in Chemical Mechanical Planarization. (xsd:string)
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Rui_Wang_0092>
swrc:pages	1024-1028 (xsd:string)
dcterms:partOf	<https://dblp.l3s.de/d2r/resource/publications/conf/ieem/2021>
owl:sameAs	<http://bibsonomy.org/uri/bibtexkey/conf/ieem/Wang21/dblp>
owl:sameAs	<http://dblp.rkbexplorer.com/id/conf/ieem/Wang21>
rdfs:seeAlso	<http://dblp.uni-trier.de/db/conf/ieem/ieem2021.html#Wang21>
rdfs:seeAlso	<https://doi.org/10.1109/IEEM50564.2021.9672985>
swrc:series	<https://dblp.l3s.de/d2r/resource/conferences/ieem>
dc:title	A Feature Ensemble Model for Material Rate Prediction in Chemical Mechanical Planarization. (xsd:string)
dc:type	<http://purl.org/dc/dcmitype/Text>
rdf:type	swrc:InProceedings
rdf:type	foaf:Document