Precision Positioning down to Single Nanometres Based on Micro Harmonic Drive Systems.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/ifip5-5/StaigerD08
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Precision Positioning down to Single Nanometres Based on Micro Harmonic Drive Systems.
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Precision Positioning down to Single Nanometres Based on Micro Harmonic Drive Systems.
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