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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ifip5-5/YangR10>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hongyi_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Svetan_M._Ratchev>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2F978-3-642-11598-1%5F9>
foaf:homepage <https://doi.org/10.1007/978-3-642-11598-1_9>
dc:identifier DBLP conf/ifip5-5/YangR10 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2F978-3-642-11598-1%5F9 (xsd:string)
dcterms:issued 2010 (xsd:gYear)
rdfs:label Focused Ion Beam Micro Machining and Micro Assembly. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hongyi_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Svetan_M._Ratchev>
swrc:pages 81-86 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ifip5-5/2010ipas>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ifip5-5/YangR10/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ifip5-5/YangR10>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ifip5-5/ipas2010.html#YangR10>
rdfs:seeAlso <https://doi.org/10.1007/978-3-642-11598-1_9>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ifip5-5>
dc:title Focused Ion Beam Micro Machining and Micro Assembly. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document