[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/imw2/AliOKLLSRSPKCRH22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/A.-S._Royet>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/A._Prabhu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ayse_S%E2%88%9A%C4%BEnb%E2%88%9A%C4%BEl>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Christelle_Charpin-Nicolle>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/D._Sourav>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/David_Lehninger>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kati_K%E2%88%9A%C4%BEhnel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Konrad_Seidel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Laurent_Grenouillet>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._Rudolph>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Malte_Czernohorsky>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Maximilian_Lederer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/R._Hoffmann>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ricardo_Olivo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._Kerdil%E2%88%9A%C2%AEs>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tarek_Ali>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Thomas_K%E2%88%9A%C2%A7mpfe>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIMW52921.2022.9779281>
foaf:homepage <https://doi.org/10.1109/IMW52921.2022.9779281>
dc:identifier DBLP conf/imw2/AliOKLLSRSPKCRH22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIMW52921.2022.9779281 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
rdfs:label Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/A.-S._Royet>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/A._Prabhu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ayse_S%E2%88%9A%C4%BEnb%E2%88%9A%C4%BEl>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Christelle_Charpin-Nicolle>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/D._Sourav>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/David_Lehninger>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kati_K%E2%88%9A%C4%BEhnel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Konrad_Seidel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Laurent_Grenouillet>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._Rudolph>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Malte_Czernohorsky>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Maximilian_Lederer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/R._Hoffmann>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ricardo_Olivo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._Kerdil%E2%88%9A%C2%AEs>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tarek_Ali>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Thomas_K%E2%88%9A%C2%A7mpfe>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/imw2/2022>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/imw2/AliOKLLSRSPKCRH22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/imw2/AliOKLLSRSPKCRH22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/imw2/imw2022.html#AliOKLLSRSPKCRH22>
rdfs:seeAlso <https://doi.org/10.1109/IMW52921.2022.9779281>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/imw2>
dc:title Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document