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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/imw2/BanerjeeBMPSMPB21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/A._P._Milenin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/G._Van_den_Bosch>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._Stiers>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jan_Van_Houdt>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/K._Banerjee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/L._Breuil>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/L._Di_Piazza>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._Pak>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sean_R._C._McMitchell>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIMW51353.2021.9439620>
foaf:homepage <https://doi.org/10.1109/IMW51353.2021.9439620>
dc:identifier DBLP conf/imw2/BanerjeeBMPSMPB21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIMW51353.2021.9439620 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label First demonstration of ferroelectric Si: HfO2 based 3D FE-FET with trench architecture for dense nonvolatile memory application. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/A._P._Milenin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/G._Van_den_Bosch>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._Stiers>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jan_Van_Houdt>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/K._Banerjee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/L._Breuil>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/L._Di_Piazza>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._Pak>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sean_R._C._McMitchell>
swrc:pages 1-4 (xsd:string)
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/imw2/imw2021.html#BanerjeeBMPSMPB21>
rdfs:seeAlso <https://doi.org/10.1109/IMW51353.2021.9439620>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/imw2>
dc:title First demonstration of ferroelectric Si: HfO2 based 3D FE-FET with trench architecture for dense nonvolatile memory application. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document