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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/imw2/BreuilNRBABRbR22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Antonio_Arreghini>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/G._Van_den_Bosch>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._Bastos>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/K._Banerjee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/L._Breuil>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/L._Nyns>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Maarten_Rosmeulen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._Rachidi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._Ramesh>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIMW52921.2022.9779307>
foaf:homepage <https://doi.org/10.1109/IMW52921.2022.9779307>
dc:identifier DBLP conf/imw2/BreuilNRBABRbR22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIMW52921.2022.9779307 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
rdfs:label High-K incorporated in a SiON tunnel layer for 3D NAND programming voltage reduction. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Antonio_Arreghini>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/G._Van_den_Bosch>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._Bastos>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/K._Banerjee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/L._Breuil>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/L._Nyns>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Maarten_Rosmeulen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._Rachidi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._Ramesh>
swrc:pages 1-4 (xsd:string)
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owl:sameAs <http://dblp.rkbexplorer.com/id/conf/imw2/BreuilNRBABRbR22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/imw2/imw2022.html#BreuilNRBABRbR22>
rdfs:seeAlso <https://doi.org/10.1109/IMW52921.2022.9779307>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/imw2>
dc:title High-K incorporated in a SiON tunnel layer for 3D NAND programming voltage reduction. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document