[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/imw2/ChuRZAS22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Johann_Alsmeier>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Seyyed_Ehsan_Esfahani_Rashidi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toshiyuki_Sega>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weishen_Chu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yanli_Zhang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIMW52921.2022.9779248>
foaf:homepage <https://doi.org/10.1109/IMW52921.2022.9779248>
dc:identifier DBLP conf/imw2/ChuRZAS22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIMW52921.2022.9779248 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
rdfs:label An Analytical Model for Thin Film Pattern-dependent Asymmetric Wafer Warpage Prediction. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Johann_Alsmeier>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Seyyed_Ehsan_Esfahani_Rashidi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toshiyuki_Sega>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weishen_Chu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yanli_Zhang>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/imw2/2022>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/imw2/ChuRZAS22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/imw2/ChuRZAS22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/imw2/imw2022.html#ChuRZAS22>
rdfs:seeAlso <https://doi.org/10.1109/IMW52921.2022.9779248>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/imw2>
dc:title An Analytical Model for Thin Film Pattern-dependent Asymmetric Wafer Warpage Prediction. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document