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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/imw2/LehningerSOKSL23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ayse_S%E2%88%9A%C4%BEnb%E2%88%9A%C4%BEl>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/David_Lehninger>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Konrad_Seidel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Maximilian_Lederer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ricardo_Olivo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Thomas_K%E2%88%9A%C2%A7mpfe>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIMW56887.2023.10145927>
foaf:homepage <https://doi.org/10.1109/IMW56887.2023.10145927>
dc:identifier DBLP conf/imw2/LehningerSOKSL23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIMW56887.2023.10145927 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Ferroelectric HfO2/ZrO2 Superlattices with Improved Leakage at Bias and Temperature Stress. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ayse_S%E2%88%9A%C4%BEnb%E2%88%9A%C4%BEl>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/David_Lehninger>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Konrad_Seidel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Maximilian_Lederer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ricardo_Olivo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Thomas_K%E2%88%9A%C2%A7mpfe>
swrc:pages 1-4 (xsd:string)
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rdfs:seeAlso <https://doi.org/10.1109/IMW56887.2023.10145927>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/imw2>
dc:title Ferroelectric HfO2/ZrO2 Superlattices with Improved Leakage at Bias and Temperature Stress. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document