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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ipmv/MengS0C21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chao_Meng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fei_Hao_0004>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jinfei_Shi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuan_Chao>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F3469951.3469953>
foaf:homepage <https://doi.org/10.1145/3469951.3469953>
dc:identifier DBLP conf/ipmv/MengS0C21 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F3469951.3469953 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label An Automatic Calibration Method for Kerf Angle in Wafer Automated Optical Inspection. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chao_Meng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fei_Hao_0004>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jinfei_Shi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuan_Chao>
swrc:pages 5-10 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ipmv/2021>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ipmv/MengS0C21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ipmv/MengS0C21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ipmv/ipmv2021.html#MengS0C21>
rdfs:seeAlso <https://doi.org/10.1145/3469951.3469953>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ipmv>
dc:title An Automatic Calibration Method for Kerf Angle in Wafer Automated Optical Inspection. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document