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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/irps/DuanSOESB21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Edgar_Olthof>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michiel_van_Soestbergen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ning_Duan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Paul_Eggenkamp>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Richard_Braspenning>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Vignesh_Subramanian>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIRPS46558.2021.9405157>
foaf:homepage <https://doi.org/10.1109/IRPS46558.2021.9405157>
dc:identifier DBLP conf/irps/DuanSOESB21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIRPS46558.2021.9405157 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label Moisture diffusion rate in an ultra-low-k dielectric and its effect on the dielectric reliability. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Edgar_Olthof>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michiel_van_Soestbergen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ning_Duan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Paul_Eggenkamp>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Richard_Braspenning>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Vignesh_Subramanian>
swrc:pages 1-7 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/irps/2021>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/irps/DuanSOESB21/dblp>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/irps/irps2021.html#DuanSOESB21>
rdfs:seeAlso <https://doi.org/10.1109/IRPS46558.2021.9405157>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/irps>
dc:title Moisture diffusion rate in an ultra-low-k dielectric and its effect on the dielectric reliability. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document