Reliability of dual-damascene local interconnects featuring cobalt on 10 nm logic technology.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/irps/GriggioPPTSTKLH18
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/irps/GriggioPPTSTKLH18
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/A._Madhavan
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/A._Yeoh
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Anthony_Schmitz
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/C._Auth
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/F._Griggio
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/F._Pan
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Gerald_S._Leatherman
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Ilan_Tsameret
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/J._Shin
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/J._Steigerwald
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/James_Palmer
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jeffery_Hicks
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/N._Toledo
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/R._Kasim
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FIRPS.2018.8353641
>
foaf:
homepage
<
https://doi.org/10.1109/IRPS.2018.8353641
>
dc:
identifier
DBLP conf/irps/GriggioPPTSTKLH18
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FIRPS.2018.8353641
(xsd:string)
dcterms:
issued
2018
(xsd:gYear)
rdfs:
label
Reliability of dual-damascene local interconnects featuring cobalt on 10 nm logic technology.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/A._Madhavan
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/A._Yeoh
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Anthony_Schmitz
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/C._Auth
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/F._Griggio
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/F._Pan
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Gerald_S._Leatherman
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Ilan_Tsameret
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/J._Shin
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/J._Steigerwald
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/James_Palmer
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jeffery_Hicks
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/N._Toledo
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/R._Kasim
>
swrc:
pages
6
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/irps/2018
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/irps/GriggioPPTSTKLH18/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/irps/GriggioPPTSTKLH18
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/irps/irps2018.html#GriggioPPTSTKLH18
>
rdfs:
seeAlso
<
https://doi.org/10.1109/IRPS.2018.8353641
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/irps
>
dc:
title
Reliability of dual-damascene local interconnects featuring cobalt on 10 nm logic technology.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document